Lab 5

Class on Monday 4th May 11:30- 13:00
Pattern transfer by liftoff and Film Deposition
https://videoconf-colibri.zoom.us/j/169918737?pwd=Q09tZEhtM2k3RlMydGttR3V2ZGs2Zz09    Password: 899036

Support slides from class available in Fenix. Students should learn more on the different techniques (sputtering, CVD, Ion beam, ALD) in the suggested bibliography: 

Chapter on Film Deposition methods (pdf in Fenix) - “Nanoelectronics and Information Technology”, by Rainer Waser (Ed) , Wiley-VCH

Pages 111-148 (Chapter 5) – “Handbook of thin film deposition processes and techniques”

Pages 319-347 (Chapter 8) – “Handbook of thin film deposition processes and techniques”

Pages 463-497 (Chapter 11) – “Handbook of thin film deposition processes and techniques”


Class on Friday 8 May
Monitor the progress in the runsheet and questions from students regarding Block#1.  All groups have to present the progress on Block#3-4 up to this date.
https://videoconf-colibri.zoom.us/j/169918737?pwd=Q09tZEhtM2k3RlMydGttR3V2ZGs2Zz09     Password: 899036

The deadline to deliver the runsheet from lab 5 is 14th May.

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