Bibliografia

Principal

• Nanoelectronics and Information Technology: Rainer Waser (Ed) 2003 Wiley-VCH

Secundária

• VLSI technology: S.M.Sze 1994 McGraw Hill International Editions
• Handbook of thin film deposition processes and techniques Principles, Methods, Equipment and Applications: Krishna Seshan (Ed) 2002 Noyes Publications / William Andrew Publishing, ISBN: 0-8155-1442-5