Bibliografia
Principal
- Lecture Notes on Principles of Plasma Processing: F. F. Chen e J.P. Chang 2003 Kluwer Academic / Plenum Publishers, ISBN: 0-306-47497-2
- Handbook of Advanced Plasma Processing Techniques: R. J. Shul e S. J. Pearton (eds.) 2000 Springer, ISBN: 3-540-66772-5
- Principles of Plasma Discharges and Materials Processing: M. A. Lieberman e A. J. Lichtenberg 1994 John Wiley, ISBN: 0-471-00577-0