Sumários
A7
8 outubro 2012, 16:00 • Joao Pedro Estrela Rodrigues Conde
A7_Biomicrofabrication and biomicrofluidics. Discussion of case studies.
A6
2 outubro 2012, 15:30 • Joao Pedro Estrela Rodrigues Conde
A6_Microfluidics_fundamentals. Why go micro for fluidic operations? The plumbing: microvalves, microchannels, micropumps and micro flow sensors. Cell-chips. Microfluidics for chemical engineering.
A5
1 outubro 2012, 16:00 • Joao Pedro Estrela Rodrigues Conde
A5_MEMS_fundamentals and applications. What are MEMS? Surface micromachining and bulk micromachining. Applications of MEMS as passive 3D structures, sensors and actuators.
A4
25 setembro 2012, 15:30 • Joao Pedro Estrela Rodrigues Conde
A4_Microfabrication 2_ film deposition methods and etching. Solution and gas phase deposition. Physical-vapor deposition and chemical vapor deposition. Direct-write deposition: spotting and ink-jet printing. Physical and chemical etching. Wet etching and dry etching. RIE and DRIE.
A3
24 setembro 2012, 16:00 • Joao Pedro Estrela Rodrigues Conde
A3_Microfabrication 1_overall description and lithography. Overall description of the process of top-down planar microfabrication. Lithography: principles and tools. Optical lithography, e-beam lithography, focused-ion beam methods. New nanoimprinting methods.