Sumários

no class

11 outubro 2016, 15:00 Joao Pedro Estrela Rodrigues Conde

no class


no class

10 outubro 2016, 16:00 Joao Pedro Estrela Rodrigues Conde

no class


A5

4 outubro 2016, 15:00 Joao Pedro Estrela Rodrigues Conde

A5_MEMS_fundamentals and applications_II. MEMS applications as passive 3D structures, and as sensors and actuators.


A4

3 outubro 2016, 16:00 Joao Pedro Estrela Rodrigues Conde

A4_MEMS_fundamentals and applications_I. The strategies for MEMS microfabrication.


A3

27 setembro 2016, 15:00 Joao Pedro Estrela Rodrigues Conde

A3_Microfabrication 2_ film deposition methods and etching. Thin-film deposition methods. Chemical and physical etching. Dry and wet etching. RIE and DRIE. Lift-off.