Sumários
A5
4 outubro 2016, 15:00 • Joao Pedro Estrela Rodrigues Conde
A5_MEMS_fundamentals and applications_II. MEMS applications as passive 3D structures, and as sensors and actuators.
A4
3 outubro 2016, 16:00 • Joao Pedro Estrela Rodrigues Conde
A4_MEMS_fundamentals and applications_I. The strategies for MEMS microfabrication.
A3
27 setembro 2016, 15:00 • Joao Pedro Estrela Rodrigues Conde
A3_Microfabrication 2_ film deposition methods and etching. Thin-film deposition methods. Chemical and physical etching. Dry and wet etching. RIE and DRIE. Lift-off.